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dc.contributor.advisorWyant, James C.en_US
dc.contributor.authorCHENG, YEOU-YEN.
dc.creatorCHENG, YEOU-YEN.en_US
dc.date.accessioned2011-10-31T18:55:47Zen
dc.date.available2011-10-31T18:55:47Zen
dc.date.issued1985en_US
dc.identifier.urihttp://hdl.handle.net/10150/187928en
dc.description.abstractThe problems of combining ideas of phase shifting interferometry (PSI) and synthetic-wavelength techniques to extend the phase measurement range of conventional single-wavelength PSI are investigated. This combination of PSI and synthetic-wavelengths gives multiple-wavelength phase-shifting interferometry the advantages of: (1) larger phase measurement range and (2) higher accuracy of phase measurement. Advantages, error sources, and limitations of single-wavelength PSI are discussed. Some practical methods to calibrate the piezoelectric transducer (PZT), used to phase shift the reference beam, are presented with experimental results. Two methods of two-wavelength PSI are used to solve the 2π ambiguity problem of single-wavelength PSI. For the first method, two sets of phase data (with 2π ambiguities) for shorter wavelengths are calculated and stored in the computer which calculates the new phase data for the equivalent-wavelength λ(eq). The "error magnification effect," which reduces the measurement precision of the first method, is then investigated. The second, more accurate method, uses the results of the first method as a reference to correct the 2π ambiguities in the single-wavelength phase data. Experimental results are included to confirm theoretical predictions. The enhancement of two-wavelength PSI is investigated, and requires the phase data of a third wavelength. Experiments are performed to verify the capability of multiple-wavelength PSI. For the wavefront being measured, the difference of the optical-path-difference (OPD) between adjacent pixels is as large as 3.3 waves. After temporal averaging of five sets of data, the repeatability of the measurement is better than 2.5 nm (0.0025%) rms (λ = 632.8 nm). This work concludes with recommendations for future work that should make the MWLPSI a more practical technique for the testing of steep aspheric surfaces.
dc.language.isoenen_US
dc.publisherThe University of Arizona.en_US
dc.rightsCopyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.en_US
dc.subjectSurfaces -- Testing -- Mathematical models.en_US
dc.subjectOptics -- Testing -- Mathematical models.en_US
dc.titleMULTIPLE-WAVELENGTH PHASE SHIFTING INTERFEROMETRY (OPTICAL-TESTING, ASPHERIC SURFACE).en_US
dc.typetexten_US
dc.typeDissertation-Reproduction (electronic)en_US
dc.identifier.oclc693611117en_US
thesis.degree.grantorUniversity of Arizonaen_US
thesis.degree.leveldoctoralen_US
dc.contributor.committeememberShannon, R.en_US
dc.contributor.committeememberParks, Robert E.en_US
dc.identifier.proquest8512679en_US
thesis.degree.disciplineOptical Sciencesen_US
thesis.degree.disciplineGraduate Collegeen_US
thesis.degree.namePh.D.en_US
refterms.dateFOA2018-04-26T18:28:57Z
html.description.abstractThe problems of combining ideas of phase shifting interferometry (PSI) and synthetic-wavelength techniques to extend the phase measurement range of conventional single-wavelength PSI are investigated. This combination of PSI and synthetic-wavelengths gives multiple-wavelength phase-shifting interferometry the advantages of: (1) larger phase measurement range and (2) higher accuracy of phase measurement. Advantages, error sources, and limitations of single-wavelength PSI are discussed. Some practical methods to calibrate the piezoelectric transducer (PZT), used to phase shift the reference beam, are presented with experimental results. Two methods of two-wavelength PSI are used to solve the 2π ambiguity problem of single-wavelength PSI. For the first method, two sets of phase data (with 2π ambiguities) for shorter wavelengths are calculated and stored in the computer which calculates the new phase data for the equivalent-wavelength λ(eq). The "error magnification effect," which reduces the measurement precision of the first method, is then investigated. The second, more accurate method, uses the results of the first method as a reference to correct the 2π ambiguities in the single-wavelength phase data. Experimental results are included to confirm theoretical predictions. The enhancement of two-wavelength PSI is investigated, and requires the phase data of a third wavelength. Experiments are performed to verify the capability of multiple-wavelength PSI. For the wavefront being measured, the difference of the optical-path-difference (OPD) between adjacent pixels is as large as 3.3 waves. After temporal averaging of five sets of data, the repeatability of the measurement is better than 2.5 nm (0.0025%) rms (λ = 632.8 nm). This work concludes with recommendations for future work that should make the MWLPSI a more practical technique for the testing of steep aspheric surfaces.


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