Committee ChairSimmons, Joseph H.
Birnie, III, Dunbar P.
MetadataShow full item record
PublisherThe University of Arizona.
RightsCopyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.
AbstractVarious physical parameters of solvents within two component, PMMA + Solvent films are analyzed for their impact upon the coating uniformity of spin deposited PMMA films. Towards this end, a model is presented for describing the surface behavior of spin-on films during the latter stages of deposition, correlating the tendency of a film toward non-uniform deposition to physical characteristics of the spin-on solution. A finite difference solution to this model is presented for two-component, spin-on films that is shown to effectively predict the uniformity of the resulting thin-film layers. The model is then used to determine the impact of specific film parameters upon the predicted spin-on uniformity of the film. Based upon these results, the interdependency between evaporation rate, solvent viscosity, surface tension and rotation rate in determining the uniformity of the spin-on film is evaluated by comparing the model predictions against those found in actual spin-on, two component films. The results from this model are used to provide a physical explanation for why certain surface non-uniformities begin to develop during spin coating.
Degree ProgramMaterials Science & Engineering