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TRENCH ETCHING IN SILICON WITH A CONTROLLABLE SIDEWALL ANGLE (TEMPERATURE)
| dc.contributor.author | Smadi, Mithkal Moh'd | |
| dc.creator | Smadi, Mithkal Moh'd, 1960- | en_US |
| dc.date.accessioned | 2013-03-28T10:10:22Z | |
| dc.date.available | 2013-03-28T10:10:22Z | |
| dc.date.issued | 1986 | en_US |
| dc.identifier.uri | http://hdl.handle.net/10150/276593 | |
| dc.language.iso | en_US | en_US |
| dc.publisher | The University of Arizona. | en_US |
| dc.rights | Copyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author. | en_US |
| dc.subject | Integrated circuits -- Design and construction. | en_US |
| dc.title | TRENCH ETCHING IN SILICON WITH A CONTROLLABLE SIDEWALL ANGLE (TEMPERATURE) | en_US |
| dc.type | text | en_US |
| dc.type | Thesis-Reproduction (electronic) | en_US |
| dc.identifier.oclc | 15581682 | en_US |
| thesis.degree.grantor | University of Arizona | en_US |
| thesis.degree.level | masters | en_US |
| dc.identifier.proquest | 1328680 | en_US |
| thesis.degree.discipline | Graduate College | en_US |
| thesis.degree.discipline | Electrical & Computer Engineering | en_US |
| thesis.degree.name | M.S. | en_US |
| dc.identifier.bibrecord | .b1594640x | en_US |
| refterms.dateFOA | 2018-06-22T22:41:15Z |
