A knowledge acquisition scheme for fault diagnosis in complex manufacturing processes

Abstract

This thesis introduces the problem of knowledge acquisition in developing a Trouble Shooting Guide (TSG) for equipment used in integrated circuit manufacturing. TSG is considered as a first step in developing an Expert Diagnostic System (EDS). The research is focused on the acquisition and refinement of actual knowledge from the manufacturing domain, and a Hierarchical Data Collection (HDC) system is introduced to solve the problem of bottleneck in developing EDS. An integrated circuit manufacturing environment is introduced, and issues relating to the collection and assessment of knowledge concerning the performance of the machine park are discussed. Raw data about equipment used in manufacturing environment is studied and results are discussed. A systematic classification of symptoms, failures, and repair activities is presented.