• Login
    View Item 
    •   Home
    • UA Graduate and Undergraduate Research
    • UA Theses and Dissertations
    • Dissertations
    • View Item
    •   Home
    • UA Graduate and Undergraduate Research
    • UA Theses and Dissertations
    • Dissertations
    • View Item
    JavaScript is disabled for your browser. Some features of this site may not work without it.

    Browse

    All of UA Campus RepositoryCommunitiesTitleAuthorsIssue DateSubmit DateSubjectsPublisherJournalThis CollectionTitleAuthorsIssue DateSubmit DateSubjectsPublisherJournal

    My Account

    LoginRegister

    About

    AboutUA Faculty PublicationsUA DissertationsUA Master's ThesesUA Honors ThesesUA PressUA YearbooksUA CatalogsUA Libraries

    Statistics

    Most Popular ItemsStatistics by CountryMost Popular Authors

    Coherence and imaging properties of non-ideal patterned multilayer structures

    • CSV
    • RefMan
    • EndNote
    • BibTex
    • RefWorks
    Thumbnail
    Name:
    azu_td_3106970_sip1_m.pdf
    Size:
    7.616Mb
    Format:
    PDF
    Download
    Author
    Beaudry, Neil A.
    Issue Date
    2003
    Keywords
    Physics, Optics.
    Advisor
    Milster, Tom D.
    
    Metadata
    Show full item record
    Publisher
    The University of Arizona.
    Rights
    Copyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.
    Abstract
    Several topics concerning the imaging properties of patterned multilayer mask structures are addressed. Using the split-step beam propagation method in conjunction with linear systems theory, the reflected electric field from a patterned multilayer structure is calculated. This calculation accounts for the finite thickness of the pattern structure and the angular dependence of the multilayer reflector. A coherence mapping relationship is developed for a patterned multilayer structure placed in the object plane of an optical system. It is shown that both the spatial period of the pattern structure as well as the angular dependence of the multilayer reflector determines when a simulation must include angular dependence in the coherence mapping. If the illumination system is non-telecentric, a spatially dependent variation of the image irradiance occurs over the field of view of the optical system. A source with a finite spectral bandwidth causes a substantial irradiance decrease in the final image, due to the spectral dependence of the multilayer structure. In an effort to analyze the effects of roughness in short-wavelength imaging systems, the theory of speckle in partially coherent imaging systems is expanded to include the effects of a pattern structure, as well as imaging system aberrations. Including a pattern structure causes the partially developed speckle to manifest itself as a line edge roughness (LER) in images printed in a binary photoresist. It is shown that the LER can increase as the system becomes more incoherent. It is also shown that defocus causes LER produced in the image plane to dramatically increase. An iterative algorithm is developed to calculate the reflected electric field from a rough multilayer structure, which uses no first-order phase approximation and includes the effects of diffraction within the structure. The iterative algorithm is used with the coherence theory developed in this dissertation to analyze the imaging properties of a patterned multilayer structure. Including the effects of the multilayer structure and the thick pattern in the simulation results in an increase in LER, a slight shift in the ideal focus position and an asymmetry in LER for off-axis illumination.
    Type
    text
    Dissertation-Reproduction (electronic)
    Degree Name
    Ph.D.
    Degree Level
    doctoral
    Degree Program
    Graduate College
    Optical Sciences
    Degree Grantor
    University of Arizona
    Collections
    Dissertations

    entitlement

     
    The University of Arizona Libraries | 1510 E. University Blvd. | Tucson, AZ 85721-0055
    Tel 520-621-6442 | repository@u.library.arizona.edu
    DSpace software copyright © 2002-2017  DuraSpace
    Quick Guide | Contact Us | Send Feedback
    Open Repository is a service operated by 
    Atmire NV
     

    Export search results

    The export option will allow you to export the current search results of the entered query to a file. Different formats are available for download. To export the items, click on the button corresponding with the preferred download format.

    By default, clicking on the export buttons will result in a download of the allowed maximum amount of items.

    To select a subset of the search results, click "Selective Export" button and make a selection of the items you want to export. The amount of items that can be exported at once is similarly restricted as the full export.

    After making a selection, click one of the export format buttons. The amount of items that will be exported is indicated in the bubble next to export format.