A scanning grating technique for measurement of submicron focused spots
Publisher
The University of Arizona.Rights
Copyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.Abstract
Many applications in optical research require the use of diffraction limited point images with reduced spot sizes. The instrumentation that evaluates these small diameter images must have high resolution (sub-micron) capabilities. One method used to measure sub-micron optical point images is a scanning grating technique. However, many characteristics of this measurement technique have not been fully examined. In this paper, the sensitivity of this measurement technique to the scanning mechanism, beam characteristics, and grating tilt is evaluated.Type
textThesis-Reproduction (electronic)
Degree Name
M.S.Degree Level
mastersDegree Program
Graduate CollegeElectrical and Computer Engineering