Novel reduced-size micromachined resonators and filters
Issue Date
2001Keywords
Engineering, Aerospace.Engineering, Electronics and Electrical.
Physics, Electricity and Magnetism.
Advisor
Papapolymerou, JohnMetadata
Show full item recordPublisher
The University of Arizona.Rights
Copyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.Abstract
With an always-increasing need for higher integration, the wireless industry poses challenges regarding miniaturization and high performance circuitry. In addition, the solutions require compatibility with the rest of the design for integration and manufacturing. The present work depicts the progress toward a novel, high quality, one-pole filter-resonator operating in the 5.6-5.8 GHz range. Quality factors up to 640 are demonstrated on Silicon planar structures with volume of 177 mm³. Further size reduction yielded a volume of 24.5 mm³ and a quality factor of 186.Type
textThesis-Reproduction (electronic)
Degree Name
M.S.Degree Level
mastersDegree Program
Graduate CollegeElectrical and Computer Engineering