AN ELECTRON MICROSCOPE INVESTIGATION OF ION-IMPLANTED SILICON CONTAINING PRE-INDUCED STACKING FAULTS
AuthorShevlin, Craig Martin, 1943-
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PublisherThe University of Arizona.
RightsCopyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.
Degree ProgramGraduate College