Optical properties of chemical vapor depositions of silicon oxynitride films
AuthorGrahn, Norman Donald, 1940-
KeywordsThin films -- Optical properties.
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PublisherThe University of Arizona.
RightsCopyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.
Degree ProgramElectrical Engineering