High Precision Optical Surface Metrology using Deflectometry

Abstract

Software Configurable Optical Test System (SCOTS) developed at University of Arizona is a highly efficient optical metrology technique based on the principle of deflectometry, which can achieve comparable accuracy with interferometry but with low-cost hardware. In a SCOTS test, an LCD display is used to generate structured light pattern to illuminate the test optics and the reflected light is captured by a digital camera. The surface slope of test optics is determined by triangulation of the display pixels, test optics, and the camera. The surface shape is obtained by the integration of the slopes. Comparing to interferometry, which has long served as an accurate non-contact optical metrology technology, SCOTS overcomes the limitation of dynamic range and sensitivity to environment. It is able to achieve high dynamic range slope measurement without requiring null optics. In this dissertation, the sensitivity and performance of the test system have been analyzed comprehensively. Sophisticated calibrations of system components have been investigated and implemented in different metrology projects to push this technology to a higher accuracy including low-order terms. A compact on-axis SCOTS system lowered the testing geometry sensitivity in the metrology of 1-meter highly aspheric secondary mirror of Large Binocular Telescope. Sub-nm accuracy was achieved in testing a high precision elliptical X-ray mirror by using reference calibration. A well-calibrated SCOTS was successfully constructed and is, at the time of writing this dissertation, being used to provide surface metrology feedback for the fabrication of the primary mirror of Daniel K. Inouye Solar Telescope which is a 4-meter off-axis parabola with more than 8 mm aspherical departure.