• Optical design and system characterization of an imaging microscope at 121.6 nm

      Gao, Weichuan; Finan, Emily; Kim, Geon-Hee; Kim, Youngsik; Milster, Thomas D.; Univ Arizona, Coll Opt Sci (SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 2018-03-09)
      We present the optical design and system characterization of an imaging microscope prototype at 121.6 nm. System engineering processes are demonstrated through the construction of a Schwarzschild microscope objective, including tolerance analysis, fabrication, alignment, and testing. Further improvements on the as-built system with a correction phase plate are proposed and analyzed. Finally, the microscope assembly and the imaging properties of the prototype are demonstrated.