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    IMPACT OF MOLECULAR BEAM EPITAXY TECHNOLOGY ON SPREAD SPECTRUM SYSTEMS

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    Author
    O’Clock, George D.
    Erickson, L. Peter
    Affiliation
    Physical Electronics Division
    Issue Date
    1981-10
    
    Metadata
    Show full item record
    Rights
    Copyright © International Foundation for Telemetering
    Collection Information
    Proceedings from the International Telemetering Conference are made available by the International Foundation for Telemetering and the University of Arizona Libraries. Visit http://www.telemetry.org/index.php/contact-us if you have questions about items in this collection.
    Publisher
    International Foundation for Telemetering
    Journal
    International Telemetering Conference Proceedings
    Abstract
    The ultimate limitations in system performance capabilities are often due to constraints imposed by various device or chip fabrication processes. Recent advances in semiconductor processing technology have helped to lift some of the device performance barriers that have a negative impact on system performance. Molecular Beam Epitaxy is one particular technique that has the capability to fabricate a wide range of high performance semiconductor devices with high levels of reliability and yield. Molecular Beam Epitaxy (MBE) is an ultrahigh vacuum evaporation process for growing epitaxial films on various substrate materials. The basic constituents of the films are thermally evaporated and directed toward a heated substrate. The evaporated materials are deposited on the heated substrate surface forming a film. MBE offers the ability to maintain a higher level of precise control over material composition and film thickness required for semiconductor devices utilized in microwave and millimeter wave spread spectrum system applications.
    Sponsors
    International Foundation for Telemetering
    ISSN
    0884-5123
    0074-9079
    Additional Links
    http://www.telemetry.org/
    Collections
    International Telemetering Conference Proceedings, Volume 17 (1981)

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