Acoustic characterization of two megasonic devices for photomask cleaning
MetadataShow full item record
PublisherSPIE-INT SOC OPTICAL ENGINEERING
CitationClaudio Zanelli ; Dushyanth Giridhar ; Manish Keswani ; Nagaya Okada ; Jyhwei Hsu and Petrie Yam " Acoustic characterization of two megasonic devices for photomask cleaning ", Proc. SPIE 9985, Photomask Technology 2016, 998524 (October 5, 2016); doi:10.1117/12.2243124; http://dx.doi.org/10.1117/12.2243124
JournalPHOTOMASK TECHNOLOGY 2016
Rights© 2016 SPIE
Collection InformationThis item from the UA Faculty Publications collection is made available by the University of Arizona with support from the University of Arizona Libraries. If you have questions, please contact us at email@example.com.
AbstractWet photomask cleaning relies on megasonic agitation to enhance the process, but there are many challenges to reliably maximize particle removal efficiency (PRE) and minimize damage. With the shift to pellicle-free EUV masks, photomask processes are more vulnerable to contamination, increasing the urgency to improve the cleaning process. This difficulty is largely due to the unavailability of appropriate measurement of the acoustic field. Typically all that is known about the acoustic output is the driving frequency and the electric power delivered to a transducer, both global parameters that tell little about the field distribution over the substrate, the actual amplitude of the sound at the substrate, or the levels of cavitation (stable and transient) present at the substrate. © (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE).
VersionFinal published version