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    Acoustic characterization of two megasonic devices for photomask cleaning

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    Author
    Zanelli, Claudio
    Giridhar, Dushyanth
    Keswani, Manish
    Okada, Nagaya
    Hsu, Jyhwei
    Yam, Petrie
    Affiliation
    Univ Arizona
    Issue Date
    2016-10-05
    
    Metadata
    Show full item record
    Publisher
    SPIE-INT SOC OPTICAL ENGINEERING
    Citation
    Claudio Zanelli ; Dushyanth Giridhar ; Manish Keswani ; Nagaya Okada ; Jyhwei Hsu and Petrie Yam " Acoustic characterization of two megasonic devices for photomask cleaning ", Proc. SPIE 9985, Photomask Technology 2016, 998524 (October 5, 2016); doi:10.1117/12.2243124; http://dx.doi.org/10.1117/12.2243124
    Journal
    PHOTOMASK TECHNOLOGY 2016
    Rights
    © 2016 SPIE.
    Collection Information
    This item from the UA Faculty Publications collection is made available by the University of Arizona with support from the University of Arizona Libraries. If you have questions, please contact us at repository@u.library.arizona.edu.
    Abstract
    Wet photomask cleaning relies on megasonic agitation to enhance the process, but there are many challenges to reliably maximize particle removal efficiency (PRE) and minimize damage. With the shift to pellicle-free EUV masks, photomask processes are more vulnerable to contamination, increasing the urgency to improve the cleaning process. This difficulty is largely due to the unavailability of appropriate measurement of the acoustic field. Typically all that is known about the acoustic output is the driving frequency and the electric power delivered to a transducer, both global parameters that tell little about the field distribution over the substrate, the actual amplitude of the sound at the substrate, or the levels of cavitation (stable and transient) present at the substrate. © (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE).
    ISSN
    0277-786X
    DOI
    10.1117/12.2243124
    Version
    Final published version
    Additional Links
    http://proceedings.spiedigitallibrary.org/proceeding.aspx?doi=10.1117/12.2243124
    ae974a485f413a2113503eed53cd6c53
    10.1117/12.2243124
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