Fast fabrication of polymer out-of-plane optical coupler by gray-scale lithography
Publisher
OPTICAL SOC AMERCitation
Fast fabrication of polymer out-of-plane optical coupler by gray-scale lithography 2017, 25 (15):17960 Optics ExpressJournal
Optics ExpressRights
© 2017 Optical Society of America.Collection Information
This item from the UA Faculty Publications collection is made available by the University of Arizona with support from the University of Arizona Libraries. If you have questions, please contact us at repository@u.library.arizona.edu.Abstract
We report a fabrication process of a polymer, and mirror-based out-of-plane optical coupler. In the process, a pre-formed mirror blank made of a buffer coat material is re-exposed by a laser direct writing tool with low numerical aperture of 0.1. The fabrication process is inherently fast because of the low numerical aperture (NA) process. The surface figure of the mirror is controlled under 0.04 waves in root-mean-square (RMS) at 1.55 mu m wavelength, with mirror angle of 45 +/- 1 degrees. Nominal insertion loss of 8.5dB of the mirror-based coupler was confirmed with polymer waveguides fabricated simultaneously. (C) 2017 Optical Society of AmericaNote
Open Access Journal.ISSN
1094-4087PubMed ID
28789284Version
Final published versionSponsors
Intel Corp.Additional Links
https://www.osapublishing.org/abstract.cfm?URI=oe-25-15-17960ae974a485f413a2113503eed53cd6c53
10.1364/OE.25.017960
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