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dc.contributor.authorSummitt, Chris
dc.contributor.authorWang, Sunglin
dc.contributor.authorNamnabat, Soha
dc.contributor.authorJohnson, Lee
dc.contributor.authorMilster, Tom
dc.contributor.authorTakashima, Yuzuru
dc.date.accessioned2017-09-29T23:07:23Z
dc.date.available2017-09-29T23:07:23Z
dc.date.issued2017-07-18
dc.identifier.citationFast fabrication of polymer out-of-plane optical coupler by gray-scale lithography 2017, 25 (15):17960 Optics Expressen
dc.identifier.issn1094-4087
dc.identifier.pmid28789284
dc.identifier.doi10.1364/OE.25.017960
dc.identifier.urihttp://hdl.handle.net/10150/625707
dc.description.abstractWe report a fabrication process of a polymer, and mirror-based out-of-plane optical coupler. In the process, a pre-formed mirror blank made of a buffer coat material is re-exposed by a laser direct writing tool with low numerical aperture of 0.1. The fabrication process is inherently fast because of the low numerical aperture (NA) process. The surface figure of the mirror is controlled under 0.04 waves in root-mean-square (RMS) at 1.55 mu m wavelength, with mirror angle of 45 +/- 1 degrees. Nominal insertion loss of 8.5dB of the mirror-based coupler was confirmed with polymer waveguides fabricated simultaneously. (C) 2017 Optical Society of America
dc.description.sponsorshipIntel Corp.en
dc.language.isoenen
dc.publisherOPTICAL SOC AMERen
dc.relation.urlhttps://www.osapublishing.org/abstract.cfm?URI=oe-25-15-17960en
dc.rights© 2017 Optical Society of Americaen
dc.titleFast fabrication of polymer out-of-plane optical coupler by gray-scale lithographyen
dc.typeArticleen
dc.contributor.departmentUniv Arizona, Coll Opt Scien
dc.identifier.journalOptics Expressen
dc.description.noteOpen Access Journal.en
dc.description.collectioninformationThis item from the UA Faculty Publications collection is made available by the University of Arizona with support from the University of Arizona Libraries. If you have questions, please contact us at repository@u.library.arizona.edu.en
dc.eprint.versionFinal published versionen
refterms.dateFOA2018-08-19T23:54:36Z
html.description.abstractWe report a fabrication process of a polymer, and mirror-based out-of-plane optical coupler. In the process, a pre-formed mirror blank made of a buffer coat material is re-exposed by a laser direct writing tool with low numerical aperture of 0.1. The fabrication process is inherently fast because of the low numerical aperture (NA) process. The surface figure of the mirror is controlled under 0.04 waves in root-mean-square (RMS) at 1.55 mu m wavelength, with mirror angle of 45 +/- 1 degrees. Nominal insertion loss of 8.5dB of the mirror-based coupler was confirmed with polymer waveguides fabricated simultaneously. (C) 2017 Optical Society of America


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