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    Fringe-print-through error analysis and correction in snapshot phase-shifting interference microscope

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    Author
    Zhang, Yu
    Tian, Xiaobo
    Liang, Rongguang
    Affiliation
    Univ Arizona, Coll Opt Sci
    Issue Date
    2017-10-17
    
    Metadata
    Show full item record
    Publisher
    OPTICAL SOC AMER
    Citation
    Fringe-print-through error analysis and correction in snapshot phase-shifting interference microscope 2017, 25 (22):26554 Optics Express
    Journal
    Optics Express
    Rights
    © 2017 Optical Society of America.
    Collection Information
    This item from the UA Faculty Publications collection is made available by the University of Arizona with support from the University of Arizona Libraries. If you have questions, please contact us at repository@u.library.arizona.edu.
    Abstract
    To reduce the environmental errors, a snapshot phase-shifting interference microscope (SPSIM) has been developed for surface roughness measurement. However, fringe-print-through (FPT) error widely exists in the phase-shifting interferometry (PSI). To ensure the measurement accuracy, we analyze the sources which introduce the FPT error in the SPSIM. We also develop a FPT error correction algorithm which can be used in the different intensity distribution conditions. The simulation and experiment verify the correctness and feasibility of the FPT error correction algorithm. (C) 2017 Optical Society of America
    Note
    Open access journal.
    ISSN
    1094-4087
    PubMed ID
    29092145
    DOI
    10.1364/OE.25.026554
    Version
    Final published version
    Sponsors
    National Natural Science Foundation of China (NSFC) [11304034]; China Scholarship Council [201508220104]; Program of Jilin Provincial Educational Department [2015241]; Doctoral Research Foundation of Northeast Electric Power University [BSJXM-201218]; Scientific Basic Research Foundation of Northeast Electric Power University; Oculus LLC
    Additional Links
    https://www.osapublishing.org/abstract.cfm?URI=oe-25-22-26554
    ae974a485f413a2113503eed53cd6c53
    10.1364/OE.25.026554
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