Fringe-print-through error analysis and correction in snapshot phase-shifting interference microscope
Publisher
OPTICAL SOC AMERCitation
Fringe-print-through error analysis and correction in snapshot phase-shifting interference microscope 2017, 25 (22):26554 Optics ExpressJournal
Optics ExpressRights
© 2017 Optical Society of America.Collection Information
This item from the UA Faculty Publications collection is made available by the University of Arizona with support from the University of Arizona Libraries. If you have questions, please contact us at repository@u.library.arizona.edu.Abstract
To reduce the environmental errors, a snapshot phase-shifting interference microscope (SPSIM) has been developed for surface roughness measurement. However, fringe-print-through (FPT) error widely exists in the phase-shifting interferometry (PSI). To ensure the measurement accuracy, we analyze the sources which introduce the FPT error in the SPSIM. We also develop a FPT error correction algorithm which can be used in the different intensity distribution conditions. The simulation and experiment verify the correctness and feasibility of the FPT error correction algorithm. (C) 2017 Optical Society of AmericaNote
Open access journal.ISSN
1094-4087PubMed ID
29092145Version
Final published versionSponsors
National Natural Science Foundation of China (NSFC) [11304034]; China Scholarship Council [201508220104]; Program of Jilin Provincial Educational Department [2015241]; Doctoral Research Foundation of Northeast Electric Power University [BSJXM-201218]; Scientific Basic Research Foundation of Northeast Electric Power University; Oculus LLCAdditional Links
https://www.osapublishing.org/abstract.cfm?URI=oe-25-22-26554ae974a485f413a2113503eed53cd6c53
10.1364/OE.25.026554
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