Geometrical error calibration in reflective surface testing based on reverse Hartmann test
AffiliationUniv Arizona, Coll Opt Sci
MetadataShow full item record
PublisherSPIE-INT SOC OPTICAL ENGINEERING
CitationZhidong Gong, Daodang Wang, Ping Xu, Chao Wang, Rongguang Liang, Ming Kong, Jun Zhao, Linhai Mo, Shuhui Mo, "Geometrical error calibration in reflective surface testing based on reverse Hartmann test", Proc. SPIE 10373, Applied Optical Metrology II, 103730K (23 August 2017); doi: 10.1117/12.2268372; https://doi.org/10.1117/12.2268372
JournalAPPLIED OPTICAL METROLOGY II
Rights© 2017 SPIE.
Collection InformationThis item from the UA Faculty Publications collection is made available by the University of Arizona with support from the University of Arizona Libraries. If you have questions, please contact us at email@example.com.
AbstractIn the fringe-illumination deflectometry based on reverse-Hartmann-test configuration, ray tracing of the modeled testing system is performed to reconstruct the test surface error. Careful calibration of system geometry is required to achieve high testing accuracy. To realize the high-precision surface testing with reverse Hartmann test, a computer-aided geometrical error calibration method is proposed. The aberrations corresponding to various geometrical errors are studied. With the aberration weights for various geometrical errors, the computer-aided optimization of system geometry with iterative ray tracing is carried out to calibration the geometrical error, and the accuracy in the order of sub-nanometer is achieved.
VersionFinal published version
SponsorsZhejiang Provincial Natural Science Foundation of China [LY17E050014]; National Natural Science Foundation of China (NSFC) [51375467, 11404312, 51476154, 51404223]; Zhejiang Key Discipline of Instrument Science and Technology [JL150508]