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dc.contributor.authorWang, Daodang
dc.contributor.authorGong, Zhidong
dc.contributor.authorXu, Ping
dc.contributor.authorLiang, Rongguang
dc.contributor.authorKong, Ming
dc.contributor.authorZhao, Jun
dc.contributor.authorWang, Chao
dc.contributor.authorMo, Linhai
dc.contributor.authorMo, Shuhui
dc.date.accessioned2018-03-30T19:12:03Z
dc.date.available2018-03-30T19:12:03Z
dc.date.issued2017-08-23
dc.identifier.citationZhidong Gong, Daodang Wang, Ping Xu, Chao Wang, Rongguang Liang, Ming Kong, Jun Zhao, Linhai Mo, Shuhui Mo, "Geometrical error calibration in reflective surface testing based on reverse Hartmann test", Proc. SPIE 10373, Applied Optical Metrology II, 103730K (23 August 2017); doi: 10.1117/12.2268372; https://doi.org/10.1117/12.2268372en
dc.identifier.issn0277-786X
dc.identifier.issn1996-756X
dc.identifier.doi10.1117/12.2268372
dc.identifier.urihttp://hdl.handle.net/10150/627168
dc.description.abstractIn the fringe-illumination deflectometry based on reverse-Hartmann-test configuration, ray tracing of the modeled testing system is performed to reconstruct the test surface error. Careful calibration of system geometry is required to achieve high testing accuracy. To realize the high-precision surface testing with reverse Hartmann test, a computer-aided geometrical error calibration method is proposed. The aberrations corresponding to various geometrical errors are studied. With the aberration weights for various geometrical errors, the computer-aided optimization of system geometry with iterative ray tracing is carried out to calibration the geometrical error, and the accuracy in the order of sub-nanometer is achieved.
dc.description.sponsorshipZhejiang Provincial Natural Science Foundation of China [LY17E050014]; National Natural Science Foundation of China (NSFC) [51375467, 11404312, 51476154, 51404223]; Zhejiang Key Discipline of Instrument Science and Technology [JL150508]en
dc.language.isoenen
dc.publisherSPIE-INT SOC OPTICAL ENGINEERINGen
dc.relation.urlhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/10373/2268372/Geometrical-error-calibration-in-reflective-surface-testing-based-on-reverse/10.1117/12.2268372.fullen
dc.rights© (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE).en
dc.subjectsurface testingen
dc.subjectdeflectometryen
dc.subjectgeometrical error calibrationen
dc.subjectcomputer-aided optimizationen
dc.titleGeometrical error calibration in reflective surface testing based on reverse Hartmann testen
dc.typeArticleen
dc.contributor.departmentUniv Arizona, Coll Opt Scien
dc.identifier.journalAPPLIED OPTICAL METROLOGY IIen
dc.description.collectioninformationThis item from the UA Faculty Publications collection is made available by the University of Arizona with support from the University of Arizona Libraries. If you have questions, please contact us at repository@u.library.arizona.edu.en
dc.eprint.versionFinal published versionen
refterms.dateFOA2018-06-13T04:22:03Z
html.description.abstractIn the fringe-illumination deflectometry based on reverse-Hartmann-test configuration, ray tracing of the modeled testing system is performed to reconstruct the test surface error. Careful calibration of system geometry is required to achieve high testing accuracy. To realize the high-precision surface testing with reverse Hartmann test, a computer-aided geometrical error calibration method is proposed. The aberrations corresponding to various geometrical errors are studied. With the aberration weights for various geometrical errors, the computer-aided optimization of system geometry with iterative ray tracing is carried out to calibration the geometrical error, and the accuracy in the order of sub-nanometer is achieved.


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