General testing method for refractive surfaces based on reverse Hartmann test
AffiliationUniv Arizona, Coll Opt Sci
MetadataShow full item record
PublisherSPIE-INT SOC OPTICAL ENGINEERING
CitationPing Xu, Daodang Wang, Zhidong Gong, Zhongmin Xie, Rongguang Liang, Ming Kong, Jun Zhao, Linhai Mo, Shuhui Mo, "General testing method for refractive surfaces based on reverse Hartmann test", Proc. SPIE 10373, Applied Optical Metrology II, 103730J (23 August 2017); doi: 10.1117/12.2273189; https://doi.org/10.1117/12.2273189
JournalAPPLIED OPTICAL METROLOGY II
Rights© (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE).
Collection InformationThis item from the UA Faculty Publications collection is made available by the University of Arizona with support from the University of Arizona Libraries. If you have questions, please contact us at firstname.lastname@example.org.
AbstractThe testing technique with high dynamic range is required to meet the measurement of refractive wavefront with large distortion from test refractive surface. A general deflectometric method based on reverse Hartmann test is proposed to test refractive surfaces. Ray tracing of the modeled testing system is performed to reconstruct the refractive wavefront from test surface, in which computer-aided optimization of system geometry is performed to calibrate the geometrical error. For the refractive wavefront error with RMS 255 mu m, the testing precision better than 0.5 mu m is achieved.
VersionFinal published version
SponsorsNational Natural Science Foundation of China (NSFC) [51375467, 11404312, 51476154, 51404223]; Zhejiang Provincial Natural Science Foundation of China [LY17E050014]; Zhejiang Key Discipline of Instrument Science and Technology [JL150508, JL150502]