Spectrally controlled interferometry for measurements of flat and spherical optics
Affiliation
Univ Arizona, Coll Opt SciIssue Date
2017-10-16Keywords
Interferometryspectrally controlled
white light
broadband
metrology
spherical
optics
coherence
radius of curvature
scanning interferometry
Metadata
Show full item recordPublisher
SPIE-INT SOC OPTICAL ENGINEERINGCitation
Chase Salsbury, Artur G. Olszak, "Spectrally controlled interferometry for measurements of flat and spherical optics", Proc. SPIE 10448, Optifab 2017, 104481C (16 October 2017); doi: 10.1117/12.2279811; https://doi.org/10.1117/12.2279811Journal
OPTIFAB 2017Rights
© (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE).Collection Information
This item from the UA Faculty Publications collection is made available by the University of Arizona with support from the University of Arizona Libraries. If you have questions, please contact us at repository@u.library.arizona.edu.Abstract
Conventional interferometry is widely used to measure spherical and flat surfaces with nanometer level precision but is plagued by back reflections. We describe a new method of isolating the measurement surface by controlling spectral properties of the source (Spectrally Controlled Interferometry - SCI). Using spectral modulation of the interferometer's source enables formation of localized fringes where the optical path difference is non-zero. As a consequence it becomes possible to form white-light like fringes in common path interferometers, such as the Fizeau. The proposed setup does not require mechanical phase shifting, resulting in simpler instruments and the ability to upgrade existing interferometers. Furthermore, it allows absolute measurement of distance, including radius of curvature of lenses in a single setup with possibility of improving the throughput and removing some modes of failure.ISSN
0277-786X1996-756X
Version
Final published versionae974a485f413a2113503eed53cd6c53
10.1117/12.2279811