Instantaneous phase mapping deflectometry for dynamic deformable mirror characterization

Abstract

We present an instantaneous phase mapping deflectometry (PMD) system in the context of measuring a continuous surface deformable mirror (DM). Deflectometry has a high dynamic range, enabling the full range of surfaces generated by the DM to be measured. The recent development of an instantaneous PMD system leverages the simple setup of the PMD system to measure dynamic objects with accuracy similar to an interferometer. To demonstrate the capabilities of this technology, we perform a linearity measurement of the actuator motion in a continuous surface DM, which is critical for closed loop control in adaptive optics applications. We measure the entire set of actuators across the DM as they traverse their full range of motion with a Shack-Hartman wavefront sensor, thereby obtaining the influence function. Given the influence function of each actuator, the DM can produce specific Zernike terms on its surface. We then measure the linearity of the Zernike modes available in the DM software using the instantaneous PMD system. By obtaining the relationship between modes, we can more accurately generate surface profiles composed of Zernike terms. This ability is useful for other dynamic freeform metrology applications that utilize the DM as a null component.