Thermal Studies of Nanoporous Si Films with Pitches on the Order of 100 nm —Comparison between Different Pore-Drilling Techniques
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NATURE PUBLISHING GROUPCitation
Hao, Q., Xu, D., Zhao, H., Xiao, Y., & Medina, F. J. (2018). Thermal Studies of Nanoporous Si Films with Pitches on the Order of 100 nm—Comparison between Different Pore-Drilling Techniques. Scientific reports, 8(1), 9056. https://doi.org/10.1038/s41598-018-26872-wJournal
SCIENTIFIC REPORTSRights
© The Author(s) 2018. This article is licensed under a Creative Commons Attribution 4.0 International License.Collection Information
This item from the UA Faculty Publications collection is made available by the University of Arizona with support from the University of Arizona Libraries. If you have questions, please contact us at repository@u.library.arizona.edu.Abstract
In recent years, nanoporous Si films have been widely studied for thermoelectric applications due to the low cost and earth abundance of Si. Despite many encouraging results, inconsistency still exists among experimental and theoretical studies of reduced lattice thermal conductivity for varied nanoporous patterns. In addition, divergence can also be found among reported data, due to the difference in sample preparation and measurement setups. In this work, systematic measurements are carried out on nanoporous Si thin films with pore pitches on the order of 100 nm, where pores are drilled either by dry etching or a focused ion beam. In addition to thermal conductivity measurements, the specific heat of the nanoporous films is simultaneously measured and agrees with the estimation using bulk values, indicating a negligible change in the phonon dispersion. Without considering coherent phonon transport, the measured thermal conductivity values agree with predictions by frequency-dependent phonon Monte Carlo simulations assuming diffusive pore-edge phonon scattering. In Monte Carlo simulations, an expanded effective pore diameter is used to account for the amorphization and oxidation on real pore edges.Note
Open access journal.ISSN
2045-2322PubMed ID
29899343Version
Final published versionSponsors
National Science Foundation CAREER Award [CBET-1651840]; AFOSR YIP Award [FA9550-16-1-0025]Additional Links
http://www.nature.com/articles/s41598-018-26872-wae974a485f413a2113503eed53cd6c53
10.1038/s41598-018-26872-w
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