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    Thermal Studies of Nanoporous Si Films with Pitches on the Order of 100 nm —Comparison between Different Pore-Drilling Techniques

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    Author
    Hao, Qing cc
    Xu, Dongchao
    Zhao, Hongbo
    Xiao, Yue
    Medina, Fabian Javier
    Affiliation
    Univ Arizona, Aerosp & Mech Engn
    Issue Date
    2018-06-13
    
    Metadata
    Show full item record
    Publisher
    NATURE PUBLISHING GROUP
    Citation
    Hao, Q., Xu, D., Zhao, H., Xiao, Y., & Medina, F. J. (2018). Thermal Studies of Nanoporous Si Films with Pitches on the Order of 100 nm—Comparison between Different Pore-Drilling Techniques. Scientific reports, 8(1), 9056. https://doi.org/10.1038/s41598-018-26872-w
    Journal
    SCIENTIFIC REPORTS
    Rights
    © The Author(s) 2018. This article is licensed under a Creative Commons Attribution 4.0 International License.
    Collection Information
    This item from the UA Faculty Publications collection is made available by the University of Arizona with support from the University of Arizona Libraries. If you have questions, please contact us at repository@u.library.arizona.edu.
    Abstract
    In recent years, nanoporous Si films have been widely studied for thermoelectric applications due to the low cost and earth abundance of Si. Despite many encouraging results, inconsistency still exists among experimental and theoretical studies of reduced lattice thermal conductivity for varied nanoporous patterns. In addition, divergence can also be found among reported data, due to the difference in sample preparation and measurement setups. In this work, systematic measurements are carried out on nanoporous Si thin films with pore pitches on the order of 100 nm, where pores are drilled either by dry etching or a focused ion beam. In addition to thermal conductivity measurements, the specific heat of the nanoporous films is simultaneously measured and agrees with the estimation using bulk values, indicating a negligible change in the phonon dispersion. Without considering coherent phonon transport, the measured thermal conductivity values agree with predictions by frequency-dependent phonon Monte Carlo simulations assuming diffusive pore-edge phonon scattering. In Monte Carlo simulations, an expanded effective pore diameter is used to account for the amorphization and oxidation on real pore edges.
    Note
    Open access journal.
    ISSN
    2045-2322
    PubMed ID
    29899343
    DOI
    10.1038/s41598-018-26872-w
    Version
    Final published version
    Sponsors
    National Science Foundation CAREER Award [CBET-1651840]; AFOSR YIP Award [FA9550-16-1-0025]
    Additional Links
    http://www.nature.com/articles/s41598-018-26872-w
    ae974a485f413a2113503eed53cd6c53
    10.1038/s41598-018-26872-w
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