Publisher
OPTICAL SOC AMERCitation
Xiaobo Tian, Xingzhou Tu, Junchao Zhang, Oliver Spires, Neal Brock, Stanley Pau, and Rongguang Liang, "Snapshot multi-wavelength interference microscope," Opt. Express 26, 18279-18291 (2018)Journal
OPTICS EXPRESSRights
© 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement.Collection Information
This item from the UA Faculty Publications collection is made available by the University of Arizona with support from the University of Arizona Libraries. If you have questions, please contact us at repository@u.library.arizona.edu.Abstract
A snapshot multi-wavelength interference microscope is proposed for high-speed measurement of large vertical range discontinuous microstructures and surface roughness. A polarization CMOS camera with a linear micro-polarizer array and Bayer filter accomplishes snapshot multi-wavelength phase-shifting measurement. Four interferograms with pi/2 phase shift are captured at each wavelength for phase measurement, the 2 pi ambiguities are removed by using two or three wavelengths. (C) 2018 Optical Society of America under the terms of the OSA Open Access Publishing AgreementNote
Open access journal.ISSN
1094-4087Version
Final published versionSponsors
National Science Foundation (NSF) [1455630, 1607358]; National Institutes of Health (NIH) [S10OD018061]; TRIF Space Exploration & Optical Sciences (SEOS)Additional Links
https://www.osapublishing.org/abstract.cfm?URI=oe-26-14-18279ae974a485f413a2113503eed53cd6c53
10.1364/OE.26.018279