AffiliationUniv Arizona, Coll Opt Sci
MetadataShow full item record
PublisherOPTICAL SOC AMER
CitationXiaobo Tian, Xingzhou Tu, Junchao Zhang, Oliver Spires, Neal Brock, Stanley Pau, and Rongguang Liang, "Snapshot multi-wavelength interference microscope," Opt. Express 26, 18279-18291 (2018)
Rights© 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
Collection InformationThis item from the UA Faculty Publications collection is made available by the University of Arizona with support from the University of Arizona Libraries. If you have questions, please contact us at firstname.lastname@example.org.
AbstractA snapshot multi-wavelength interference microscope is proposed for high-speed measurement of large vertical range discontinuous microstructures and surface roughness. A polarization CMOS camera with a linear micro-polarizer array and Bayer filter accomplishes snapshot multi-wavelength phase-shifting measurement. Four interferograms with pi/2 phase shift are captured at each wavelength for phase measurement, the 2 pi ambiguities are removed by using two or three wavelengths. (C) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
NoteOpen access journal.
VersionFinal published version
SponsorsNational Science Foundation (NSF) [1455630, 1607358]; National Institutes of Health (NIH) [S10OD018061]; TRIF Space Exploration & Optical Sciences (SEOS)