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    Snapshot multi-wavelength interference microscope

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    oe-26-14-18279.pdf
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    Final Published version
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    Author
    Tian, Xiaobo
    Tu, Xingzhou
    Zhang, Junchao
    Spires, Oliver
    Brock, Neal
    Pau, Stanley
    Liang, Rongguang
    Affiliation
    Univ Arizona, Coll Opt Sci
    Issue Date
    2018-07-09
    
    Metadata
    Show full item record
    Publisher
    OPTICAL SOC AMER
    Citation
    Xiaobo Tian, Xingzhou Tu, Junchao Zhang, Oliver Spires, Neal Brock, Stanley Pau, and Rongguang Liang, "Snapshot multi-wavelength interference microscope," Opt. Express 26, 18279-18291 (2018)
    Journal
    OPTICS EXPRESS
    Rights
    © 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
    Collection Information
    This item from the UA Faculty Publications collection is made available by the University of Arizona with support from the University of Arizona Libraries. If you have questions, please contact us at repository@u.library.arizona.edu.
    Abstract
    A snapshot multi-wavelength interference microscope is proposed for high-speed measurement of large vertical range discontinuous microstructures and surface roughness. A polarization CMOS camera with a linear micro-polarizer array and Bayer filter accomplishes snapshot multi-wavelength phase-shifting measurement. Four interferograms with pi/2 phase shift are captured at each wavelength for phase measurement, the 2 pi ambiguities are removed by using two or three wavelengths. (C) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
    Note
    Open access journal.
    ISSN
    1094-4087
    DOI
    10.1364/OE.26.018279
    Version
    Final published version
    Sponsors
    National Science Foundation (NSF) [1455630, 1607358]; National Institutes of Health (NIH) [S10OD018061]; TRIF Space Exploration & Optical Sciences (SEOS)
    Additional Links
    https://www.osapublishing.org/abstract.cfm?URI=oe-26-14-18279
    ae974a485f413a2113503eed53cd6c53
    10.1364/OE.26.018279
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