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dc.contributor.advisorShadman, Farhang
dc.contributor.authorChang, YenHsun
dc.creatorChang, YenHsun
dc.date.accessioned2019-03-21T01:13:15Z
dc.date.available2019-03-21T01:13:15Z
dc.date.issued2018
dc.identifier.urihttp://hdl.handle.net/10150/631923
dc.description.abstractThe study of the thesis is about the energetic material that are used in semiconductor industries. A process model is developed to simulate the processes that results in some run-away exothermic reactions involving reactive deposited materials in the downstream of typical deposition reactors used in semiconductor manufacturing, such as chemical vapor deposition(CVD) and atomic level deposition(ALD). The potential sources of energetic material have been pointed out in the study. This model takes into account various transport and reactions involved in the process and reveals the details of the mechanism that trigger these uncontrolled energetic reactions and the potential damaging effects due to formation of hotspots. Using the developed model, a parameter study is conducted to see the effect of various parameters on this process. In particular, the concentration of reactants, the accumulation due to competition between the deposition and reaction, the gas flow rate and the properties of reactants and reactions play the key role in the trigger mechanism as well as the location and time of hot spot formation. Based on the results, a number of techniques are suggested to minimize and mitigate the occurrence of these energetic events.
dc.language.isoen
dc.publisherThe University of Arizona.
dc.rightsCopyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction, presentation (such as public display or performance) of protected items is prohibited except with permission of the author.
dc.subjectEnergetic events
dc.subjectenergetic material
dc.subjectprocess stimulation model
dc.titleKinetics and Mechanism of Energetic Events in Deposition Reactor Systems for Semiconductor Fabrication
dc.typetext
dc.typeElectronic Thesis
thesis.degree.grantorUniversity of Arizona
thesis.degree.levelmasters
dc.contributor.committeememberGuzman, Roberto
dc.contributor.committeememberGervasio, Dominic
thesis.degree.disciplineGraduate College
thesis.degree.disciplineChemical Engineering
thesis.degree.nameM.S.
refterms.dateFOA2019-03-21T01:13:15Z


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