Closed-loop next generation laser polishing
Publisher
SPIE-INT SOC OPTICAL ENGINEERINGCitation
Rolf Rascher, Christian Vogt, Oliver Fähnle, and DaeWook Kim "Closed-loop next generation laser polishing ", Proc. SPIE 10829, Fifth European Seminar on Precision Optics Manufacturing, 108290M (7 August 2018); doi: 10.1117/12.2318749; https://doi.org/10.1117/12.2318749Rights
© 2018 SPIE.Collection Information
This item from the UA Faculty Publications collection is made available by the University of Arizona with support from the University of Arizona Libraries. If you have questions, please contact us at repository@u.library.arizona.edu.Abstract
A novel fabrication parameter controlling method for laser polishing processes called C-Lasso (Control of LASer Surface Optimization) is presented, monitoring within the footprint the smoothening process as well as the removal of ssd in situ. Therefore, it is possible to determine and control the optimum dwell time a footprint needs to stay at a certain point before moving further enabling a more stable and cost optimized polishing.ISSN
97815106227089781510622715