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    Spectrally controlled source for interferometric measurements of multiple surface cavities

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    Author
    Posthumus, Jan
    Salsbury, Chase
    Olszak, Artur
    Affiliation
    Univ Arizona, Coll Opt Sci
    Issue Date
    2018
    Keywords
    interferomtery
    metrology
    spectrally controlled interferometry
    SCI
    phase shifting
    white light interferometry
    laser interferometry
    coherence
    
    Metadata
    Show full item record
    Publisher
    SPIE-INT SOC OPTICAL ENGINEERING
    Citation
    Chase Salsbury, Jan Posthumus, and Artur Olszak "Spectrally controlled source for interferometric measurements of multiple surface cavities", Proc. SPIE 10829, Fifth European Seminar on Precision Optics Manufacturing, 108290C (7 August 2018); doi: 10.1117/12.2318641; https://doi.org/10.1117/12.2318641
    Journal
    FIFTH EUROPEAN SEMINAR ON PRECISION OPTICS MANUFACTURING
    Rights
    © 2018 SPIE.
    Collection Information
    This item from the UA Faculty Publications collection is made available by the University of Arizona with support from the University of Arizona Libraries. If you have questions, please contact us at repository@u.library.arizona.edu.
    Abstract
    We present a new light source capable of locating interference fringes at an adjustable distance from the interferometer. The spectrum is electronically controlled in such a way that the fringes are limited to only one of the surfaces of the optics under test. With the new source it is straightforward, for example, to measure the parallel surfaces of thin glass plates and multiple surface cavities. Existing interferometers, as well as older systems, can be upgraded with this source. Traditional methods of interferometry are widely used and accepted for simple measurement configurations, but measurement accuracy can decrease rapidly with increasing measurement complexity. For example, coherent interferometry struggles to achieve accurate and repeatable results with the presence of any additional feedback surface in the measurement cavity due to temporally coherent back reflections. Conversely, incoherent interferometers can isolate single surfaces for measurement but require more complex interferometer system designs. As a result, many of these systems are limited in their dynamic range of measurable cavity sizes and present considerable difficulties in the alignment process, increasing total measurement time. Both methods are inherently restricted by the intrinsic properties of their respective source. Spectrally controlled interferometry (SCI) is a source driven method which inherits many advantages from both coherent and incoherent interferometry while evading typical limitations. The sources spectral properties are manipulated to produce a tunable coherence function in measurement space which allows control over the coherence envelope width, the fringe location, and the fringe phase. With this source realization, a host of measurement advantages which simplify measurement complexity and reduce total measurement time becomes available. One major application is the extinction of extraneous surface back reflections. Without any mechanical translation, realignment, or traditional piezoelectric transducers, front and back surfaces of planar optics can be isolated independently and complete phase shifting interferometric (PSI) measurements can be taken. Furthermore, because all control parameters are implemented at the source level, the spectrally controlled source is a good candidate for upgrading existing interferometer systems. In this paper, we present the theoretical background for this source and the implications of the method. Additionally, a multiple surface cavity measurement is provided as a means of demonstrating the spectrally controlled sources capability to isolate individual cavities from detrimental back reflections across a large dynamic range of measurable cavity sizes without mechanical realignment. A discussion of the implementation benefits and practical details will be included. Limitations and comparisons to alternative methods will be addressed, as well.
    ISSN
    9781510622708
    9781510622715
    DOI
    10.1117/12.2318641
    Version
    Final published version
    Additional Links
    https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10829/2318641/Spectrally-controlled-source-for-interferometric-measurements-of-multiple-surface-cavities/10.1117/12.2318641.full
    ae974a485f413a2113503eed53cd6c53
    10.1117/12.2318641
    Scopus Count
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