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    Model-free optical surface reconstruction from deflectometry data

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    Author
    Graves, Logan R.
    Choi, Heejoo
    Zhao, Wenchuan
    Oh, Chang Jin
    Su, Peng
    Kim, Dae Wook
    Su, Tianquan
    Affiliation
    Univ Arizona, Coll Opt Sci
    Univ Arizona, Steward Observ
    Issue Date
    2018
    Keywords
    Deflectometry
    model-free
    metrology
    freeform
    
    Metadata
    Show full item record
    Publisher
    SPIE-INT SOC OPTICAL ENGINEERING
    Citation
    L. R. Graves, H. Choi, W. Zhao, C. J. Oh, P. Su, T. Su, and D. W. Kim "Model-free optical surface reconstruction from deflectometry data", Proc. SPIE 10742, Optical Manufacturing and Testing XII, 107420Y (14 September 2018); doi: 10.1117/12.2320745; https://doi.org/10.1117/12.2320745
    Journal
    OPTICAL MANUFACTURING AND TESTING XII
    Rights
    © (2018) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE).
    Collection Information
    This item from the UA Faculty Publications collection is made available by the University of Arizona with support from the University of Arizona Libraries. If you have questions, please contact us at repository@u.library.arizona.edu.
    Abstract
    Deflectometry is a metrology method able to measure large surface slope ranges that can achieve surface reconstruction accuracy similar to interferometry, making it ideal for freeform metrology. While it is a non-null method, deflectometry previously required a precise model of the unit under test to accurately reconstruct the surface. However, there are times when no such model exists, such as during the grinding phase of an optic. We developed a model-free iterative data processing technique which provides improved deflectometry surface reconstruction of optics when the correct surface model is unknown. The new method iteratively reconstructs the optical surface, leading to a reduction in error in the final reconstructed surface. Software simulations measuring the theoretical performance limitations of the model-free processing technique as well as a real-world test characterizing actual performance were performed. The method was implemented in a deflectometry system and a highly freeform surface was measured and reconstructed using both the iterative technique and a traditional non-iterative technique. The results were compared to a commercial interferometric measurement of the optic. The reconstructed surface departure from interferometric results was reduced from 44.39 mu m RMS with traditional non-iterative deflectometry down to 5.20 mu m RMS with the model-free technique reported.
    ISSN
    9781510620551
    9781510620568
    DOI
    10.1117/12.2320745
    10.1117/12.2320745.5836032524001
    Version
    Final published version
    Sponsors
    Korea Basic Science Institute; Friends of Tucson Optics (FoTO) Endowed Scholarships in Optical Sciences
    Additional Links
    https://spiedigitallibrary.org/conference-proceedings-of-spie/10742/2320745/Model-free-optical-surface-reconstruction-from-deflectometry-data/10.1117/12.2320745.full
    https://spiedigitallibrary.org/conference-presentations/10742/107420Y/Model-free-optical-surface-reconstruction-from-deflectometry-data/10.1117/12.2320745.5836032524001
    ae974a485f413a2113503eed53cd6c53
    10.1117/12.2320745
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