AffiliationUniv Arizona, Coll Opt Sci
Univ Arizona, Steward Observ
MetadataShow full item record
PublisherOPTICAL SOC AMER
CitationL. R. Graves, H. Quach, H. Choi, and D. W. Kim, "Infinite deflectometry enabling 2π-steradian measurement range," Opt. Express 27, 7602-7615 (2019)
Rights© 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
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AbstractWe present a novel deflectometry implementation termed Infinite Deflectometry. The technique provides a full aperture surface reconstruction sag map of freeform surfaces, including previously challenging to measure optics such as highly convex surfaces. The method relies on the creation of a virtual source enclosure around the tested optic, which creates a virtual 2 pi-steradian measurement range. To demonstrate the performance, a fast f/1.26 convex optical surface was measured with a commercial interferometer and with the Infinite Deflectometry system. After removing Zernike terms 1 through 37, the metrology tests resulted in absolute RMS surface values of 18.48 nm and 16.26 nm, respectively. Additionally, a freeform Alvarez lens was measured with the new technique and measured 22.34 mu m of surface sag RMS after piston, tip/tilt, and defocus had been removed. The result deviated by 488 nm RMS from a profilometer measurement while standard interferometry failed to measure the Alvarez lens due to its non-nulled wavefront dynamic range limitation. (C) 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
NoteOpen access journal.
VersionFinal published version
SponsorsII-VI Foundation Block-Gift Program; Technology Research Initiative Fund Optics/Imaging Program; Korea Basic Science Institute Foundation; Friends of Tucson Optics Endowed Scholarships in Optical Sciences