Optical design and system characterization of an imaging microscope at 121.6 nm
AffiliationUniv Arizona, Coll Opt Sci
MetadataShow full item record
CitationWeichuan Gao, Emily Finan, Geon-Hee Kim, Youngsik Kim, and Thomas D. Milster "Optical design and system characterization of an imaging microscope at 121.6 nm," Optical Engineering 57(3), 035101 (9 March 2018). https://doi.org/10.1117/1.OE.57.3.035101
RightsCopyright © 2018 SPIE.
Collection InformationThis item from the UA Faculty Publications collection is made available by the University of Arizona with support from the University of Arizona Libraries. If you have questions, please contact us at email@example.com.
AbstractWe present the optical design and system characterization of an imaging microscope prototype at 121.6 nm. System engineering processes are demonstrated through the construction of a Schwarzschild microscope objective, including tolerance analysis, fabrication, alignment, and testing. Further improvements on the as-built system with a correction phase plate are proposed and analyzed. Finally, the microscope assembly and the imaging properties of the prototype are demonstrated.
VersionFinal published version
SponsorsNational Science Foundation (NSF)