Probe misalignment calibration in fiber point-diffraction interferometer
AffiliationUniv Arizona, James C Wyant Coll Opt Sci
MetadataShow full item record
PublisherOPTICAL SOC AMER
CitationDaodang Wang, Zhongmin Xie, Chao Wang, Jian Liang, Heng Wu, and Ming Kong, "Probe misalignment calibration in fiber point-diffraction interferometer," Opt. Express 27, 34312-34322 (2019)
RightsCopyright © 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
Collection InformationThis item from the UA Faculty Publications collection is made available by the University of Arizona with support from the University of Arizona Libraries. If you have questions, please contact us at email@example.com.
AbstractThe measuring probe integrated with multiple fiber point-diffraction sources can be applied to measure both the three-dimensional coordinates and highly accurate point-diffraction wavefront. The probe determines the achievable measurement accuracy of fiber point-diffraction interferometer (PDI), in which the fiber exit end plane is required to be parallel with the detector plane. The probe misalignment due to fabrication error could introduce significant measurement error. A high-precision method is proposed to calibrate the probe misalignment in fiber PDI, including the central positioning based on phase difference and tilt adjustment based on Zernike polynomials fitting. Both numerical simulation and experiments have been carried out to demonstrate the feasibility and accuracy of the proposed probe misalignment calibration method. The proposed method provides a feasible way to address the processing uncertainty on measuring probe in fiber PDI, and enables high-precision geometry alignment and misalignment calibration in the interferometric testing systems with case of no imaging lens.
NoteOpen access journal
VersionFinal published version
SponsorsChina Postdoctoral Science FoundationChina Postdoctoral Science Foundation [2017M621928]; National Natural Science Foundation of ChinaNational Natural Science Foundation of China [51775528, 61805048]; Guangxi Key Laboratory of Optoelectronic Information Processing [GD18205]