PublisherThe University of Arizona.
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AbstractPhotoresist gratings are analyzed using ellipsometry. In the analysis, simulated experiments are performed using zeroth-order and higher-order effective medium theory (HEMT) and rigorous coupled wave analysis (RCWA). The analysis takes a close look at the amplitude and phase of individual polarization components that are not readily measured with an ellipsometer. The RCWA calculations reveal that gratings should not be treated as simple uniaxial birefringence media unless the period-to-wavelength ratio is very small. Typically, an application of HEMT causes 2% error for a period-to-wavelength ration of 0.1 in the filling factor measurement. Period-to-wavelength ratios greater than 0.1 exhibit larger errors.
Degree ProgramGraduate College