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    Robust and objective automatic optical surface inspection using modulated dark field phasing illumination

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    1110207.pdf
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    Author
    Choi, Heejoo
    Kam, John
    Berkson, Joel D.
    Graves, Logan R.
    Lei, Huang
    Kim, Dae Wook
    Affiliation
    Univ Arizona, James C Wyant Coll Opt Sci
    Univ Arizona, Dept Astron
    Issue Date
    2019-09-03
    Keywords
    Automatic optical inspection
    Particle detection
    Dark field
    Phase measurement
    
    Metadata
    Show full item record
    Publisher
    SPIE-INT SOC OPTICAL ENGINEERING
    Citation
    Choi, H., Kam, J., Berkson, J. D., Graves, L. R., Lei, H., & Kim, D. W. (2019, September). Robust and objective automatic optical surface inspection using modulated dark field phasing illumination. In Applied Optical Metrology III (Vol. 11102, p. 1110207). International Society for Optics and Photonics.
    Journal
    APPLIED OPTICAL METROLOGY III
    Rights
    © 2019 SPIE.
    Collection Information
    This item from the UA Faculty Publications collection is made available by the University of Arizona with support from the University of Arizona Libraries. If you have questions, please contact us at repository@u.library.arizona.edu.
    Abstract
    Dark field illumination (DFI) is an elegant inspection technique sometimes used to detect particles on a specular surface. However, traditional DFI struggles with repeatability, limiting its applications in automated inspection. We present an improvement to DFI by introducing a modulated dark field illumination (MDFI) that utilizes the phase rather than the intensity in the detection of defects. For modulated dark field illumination (MDFI), the phase-based information is independent from the reflectance of the surface, but has a higher sensitivity to the light scattered from a defect than DFI. As a result, we obtain a robust computational image process method that is insensitive to the environment and provides clearly defined defect information. In order to extend the application to industry, the instantaneous MDFI systems were developed and validated.
    ISSN
    0277-786X
    DOI
    10.1117/12.2529869
    Version
    Final published version
    ae974a485f413a2113503eed53cd6c53
    10.1117/12.2529869
    Scopus Count
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    UA Faculty Publications

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