Robust and objective automatic optical surface inspection using modulated dark field phasing illumination
Affiliation
Univ Arizona, James C Wyant Coll Opt SciUniv Arizona, Dept Astron
Issue Date
2019-09-03
Metadata
Show full item recordPublisher
SPIE-INT SOC OPTICAL ENGINEERINGCitation
Choi, H., Kam, J., Berkson, J. D., Graves, L. R., Lei, H., & Kim, D. W. (2019, September). Robust and objective automatic optical surface inspection using modulated dark field phasing illumination. In Applied Optical Metrology III (Vol. 11102, p. 1110207). International Society for Optics and Photonics.Journal
APPLIED OPTICAL METROLOGY IIIRights
© 2019 SPIE.Collection Information
This item from the UA Faculty Publications collection is made available by the University of Arizona with support from the University of Arizona Libraries. If you have questions, please contact us at repository@u.library.arizona.edu.Abstract
Dark field illumination (DFI) is an elegant inspection technique sometimes used to detect particles on a specular surface. However, traditional DFI struggles with repeatability, limiting its applications in automated inspection. We present an improvement to DFI by introducing a modulated dark field illumination (MDFI) that utilizes the phase rather than the intensity in the detection of defects. For modulated dark field illumination (MDFI), the phase-based information is independent from the reflectance of the surface, but has a higher sensitivity to the light scattered from a defect than DFI. As a result, we obtain a robust computational image process method that is insensitive to the environment and provides clearly defined defect information. In order to extend the application to industry, the instantaneous MDFI systems were developed and validated.ISSN
0277-786XVersion
Final published versionae974a485f413a2113503eed53cd6c53
10.1117/12.2529869