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    Fabrication and Testing of Computer Generated Holograms Using the MLA 150

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    Author
    Purvin, Kira
    Issue Date
    2021
    Keywords
    fabrication
    grayscale
    lithography
    Advisor
    Milster, Thomas D.
    
    Metadata
    Show full item record
    Publisher
    The University of Arizona.
    Rights
    Copyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction, presentation (such as public display or performance) of protected items is prohibited except with permission of the author.
    Abstract
    Grayscale lithography is a powerful technique that makes it possible to fabricate three-dimensional microstructures in photoresist. This thesis presents a newly developed process for achieving high quality grayscale lithography using the MLA 150 as well as initial results for various applications. Multiple photoresists including S1813, S1827 and AZ P4620 are characterized to provide a foundation for the developed fabrication process. A linearization regime is also presented that calibrates the MLA 150’s nominal grayscale output such that a result displaying equally spaced gray layers is achieved. The final grayscale lithography process is applied to fabricate a computer generated hologram (CGH) for use in adaptive optics for phase retrieval. A replication process is detailed that enables the exposed patterns to be replicated in NOA61 to form a usable and semi-permanent optical element. Comparisons made between the fabricated optical elements and the original designs demonstrate the success of the fabrication process.
    Type
    text
    Electronic Thesis
    Degree Name
    M.S.
    Degree Level
    masters
    Degree Program
    Graduate College
    Optical Sciences
    Degree Grantor
    University of Arizona
    Collections
    Master's Theses

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