Compact optomechanical inertial sensors with fused silica and Si-based resonators

Abstract

Inertial sensors are used in a variety of applications including inertial navigation and precision measurements. Optical measurement of test mass displacement in a resonator allows for the creation of compact accelerometer systems. Fused silica resonators allow for excellent acceleration sensitivities due to their high mechanical quality factor, Q, at room temperature, but this changes significantly at lower temperatures. The Q factor of crystalline silicon, however, remains high at low temperatures. We work with compact fused silica resonators that operate at room temperature and aim to fabricate compact comparable mechanical resonators from Si wafers. We will report on the fabrication progress of these resonators and results from ringdown and sensitivity measurements. © 2022 SPIE