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    Ultrafast laser stress figuring for accurate deformation of thin mirrors

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    Author
    Chalifoux, B.D.
    Laverty, K.A.
    Arnold, I.J.
    Affiliation
    James C. Wyant College of Optical Sciences, University of Arizona
    Issue Date
    2022
    
    Metadata
    Show full item record
    Publisher
    Optica Publishing Group (formerly OSA)
    Citation
    Chalifoux, B. D., Laverty, K. A., & Arnold, I. J. (2022). Ultrafast laser stress figuring for accurate deformation of thin mirrors. Optics Express, 30(11), 17767–17780.
    Journal
    Optics Express
    Rights
    Copyright © 2022 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement.
    Collection Information
    This item from the UA Faculty Publications collection is made available by the University of Arizona with support from the University of Arizona Libraries. If you have questions, please contact us at repository@u.library.arizona.edu.
    Abstract
    Fabricating freeform mirrors relies on accurate optical figuring processes capable of arbitrarily modifying low-spatial frequency height without creating higher-spatial frequency errors. We present a scalable process to accurately figure thin mirrors using stress generated by a focused ultrafast laser. We applied ultrafast laser stress figuring (ULSF) to four thin fused silica mirrors to correct them to 10-20 nm RMS over 28 Zernike terms, in 2-3 iterations, without significantly affecting higher-frequency errors. We measured the mirrors over a month and found that dielectric-coated mirrors were stable but stability of aluminum-coated mirrors was inconclusive. The accuracy and throughput for ULSF is on par with existing deterministic figuring processes, yet ULSF doesn’t significantly affect mid-spatial frequency errors, can be applied after mirror coating, and can scale to higher throughput using mature laser processing technologies. ULSF offers new potential to rapidly and accurately shape freeform mirrors. © 2022 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement
    Note
    Open access journal
    ISSN
    1094-4087
    DOI
    10.1364/OE.456679
    Version
    Final published version
    ae974a485f413a2113503eed53cd6c53
    10.1364/OE.456679
    Scopus Count
    Collections
    UA Faculty Publications

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