Achieving sub-nanometer roughness on aspheric optical mold by non-contact polishing using damping-clothed tool
Affiliation
James C. Wyant College of Optical Sciences, University of ArizonaDepartment of Astronomy and Steward Observatory, University of Arizona
Issue Date
2022
Metadata
Show full item recordPublisher
Optica Publishing Group (formerly OSA)Citation
Zhang, P., Li, L., Yang, Z., Pan, B., Zhang, M., Guo, X., Li, G., Kim, D., & Guo, J. (2022). Achieving sub-nanometer roughness on aspheric optical mold by non-contact polishing using damping-clothed tool. Optics Express, 30(15), 28190–28206.Journal
Optics ExpressRights
Copyright © 2022 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement.Collection Information
This item from the UA Faculty Publications collection is made available by the University of Arizona with support from the University of Arizona Libraries. If you have questions, please contact us at repository@u.library.arizona.edu.Abstract
The surface quality of optical lenses is highly required in imaging functions. Normally, ultra-precision turning is employed to fabricate the optical lenses. However, ultra-precision turning cannot meet the surface quality demands due to the tool marks. In this study, a new damping-clothed (DC) tool and chemical enhanced non-Newtonian ultrafine (CNNU) slurry for non-contact polishing are proposed to achieve sub-nanometer roughness on aspherical optical molds. A material removal model based on the hydrodynamic pressure and velocity simulation was established to calculate the dwell time in curved surface machining. The formation mechanism of sub-nanometer roughness is clarified. The proposed method and slurry were verified by the experiments in processing NiP alloy aspheric optical mold. After the process, surface roughness Sa achieved 0.54 nm and the form accuracy is less than PV 600 nm. © 2022 Optica Publishing Group.Note
Open access journalISSN
1094-4087Version
Final published versionae974a485f413a2113503eed53cd6c53
10.1364/OE.465975