ZYGO Wide-Field Interference Objective Design
Publisher
The University of Arizona.Rights
Copyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction, presentation (such as public display or performance) of protected items is prohibited except with permission of the author.Abstract
In this paper we discuss elements of optomechanical design as they relate to the design of a 1x Zygo Wide-Field (ZWF) interference objective, focusing on the design process and considerations. We review details on the motivation for many of the system requirements. We stress understanding the optimization operands that compose the merit function used to optimize the nominal design. We discuss tolerance operands and stress structuring the tolerance scheme to replicate the physical motion of optics as they are constrained by the mechanics. We then detail several relevant alignment methods that may be used and stress identifying the mounting method for proper tolerancing. We then go into detail on the interference cell, which is a critical component of the interference objective.Type
Electronic Thesistext
Degree Name
M.S.Degree Level
mastersDegree Program
Graduate CollegeOptical Sciences