Hybrid height and slope figuring method for grazing-incidence reflective optics
AffiliationUniversity of Arizona, James C. Wyant College of Optical Sciences
MetadataShow full item record
PublisherINT UNION CRYSTALLOGRAPHY
CitationWang, T., Huang, L., Ke, X., Zhu, Y., Choi, H., Pullen, W., ... & Idir, M. (2023). Hybrid height and slope figuring method for grazing-incidence reflective optics. Journal of Synchrotron Radiation, 30(1).
JournalJournal of synchrotron radiation
Rights© International Union of Crystallography. Published under a CC BY 4.0 licence.
Collection InformationThis item from the UA Faculty Publications collection is made available by the University of Arizona with support from the University of Arizona Libraries. If you have questions, please contact us at email@example.com.
AbstractGrazing-incidence reflective optics are commonly used in synchrotron radiation and free-electron laser facilities to transport and focus the emitted X-ray beams. To preserve the imaging capability at the diffraction limit, the fabrication of these optics requires precise control of both the residual height and slope errors. However, all the surface figuring methods are height based, lacking the explicit control of surface slopes. Although our preliminary work demonstrated a one-dimensional (1D) slope-based figuring model, its 2D extension is not straightforward. In this study, a novel 2D slope-based figuring method is proposed, which employs an alternating objective optimization on the slopes in the x- and y-directions directly. An analytical simulation revealed that the slope-based method achieved smaller residual slope errors than the height-based method, while the height-based method achieved smaller residual height errors than the slope-based method. Therefore, a hybrid height and slope figuring method was proposed to further enable explicit control of both the height and slopes according to the final mirror specifications. An experiment to finish an elliptical-cylindrical mirror using the hybrid method with ion beam figuring was then performed. Both the residual height and slope errors converged below the specified threshold values, which verified the feasibility and effectiveness of the proposed ideas. open access.
NoteOpen access journal
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Except where otherwise noted, this item's license is described as © International Union of Crystallography. Published under a CC BY 4.0 licence.